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Atomically Precise Deposition of Multi-Element Metal Oxide Layered Crystals Alternating Digitally Processed DC Sputtering and Surface Oxidation
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Atomically Precise Deposition of Multi-Element Metal Oxide Layered Crystals Alternating Digitally Processed DC Sputtering and Surface Oxidation

2022 MRS Spring Meeting (08/05/2022–13/05/2022)
10/05/2022

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