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Fabrication of deeply undercut GaN micro-disks by selective photo-electrochemical etching of thick InGaN/GaN superlattice
会議発表プレゼンテーション

Fabrication of deeply undercut GaN micro-disks by selective photo-electrochemical etching of thick InGaN/GaN superlattice

2021 International Conference on solid-state devices and materials (SSDM)
08/09/2021

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