抄録
InAs nanowires (NWs) were grown on SiOx pinholes formed on Si(111) substrates by molecular beam epitaxy. Influences of electron-beam (EB) irradiation on the SiOx layer on the pinhole formation and the subsequent InAs NW growth were studied. As the EB irradiation dose increased, the pinhole density in the SiOx layer decreased. From atomic force microscopy, transmission electron microscopy, and x-ray photoelectron spectroscopy results, it was found that the pinhole etching of the SiOx layer by Ga droplets was suppressed by carbon adsorption due to the EB irradiation. By forming high-density pinholes on the SiOx layer without the EB irradiation, high-density InAs NWs with 1–2 × 1010 cm−2 were grown successfully, and the uniformity in the NW diameter improved. The standard deviation of the NW diameter was 1.8 nm (8.8%) for high-density NWs. In addition, the NW diameter decreased with decreasing EB dose, and the NW diameter was controlled by adjusting the diameter of Ga droplets forming the pinholes. As the NW diameter decreased, photoluminescence spectra of the NWs shifted to higher energies than the bandgap energy of the wurtzite InAs bulk. From these results, we successfully fabricated high-density and high-uniformity InAs NWs with quantum size effects on EB-unirradiated SiOx/Si(111).