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Highly Precise Multi-Cathode Pulsed-DC Sputtering Employing Digital Processing -Application to Layer-by-Layer Synthesis of Cubic (Er0.1Y0.9)2Zr2O7 Thin Film-
ジャーナル論文 - rm_published_papers: Scientific Journal   査読済み

Highly Precise Multi-Cathode Pulsed-DC Sputtering Employing Digital Processing -Application to Layer-by-Layer Synthesis of Cubic (Er0.1Y0.9)2Zr2O7 Thin Film-

Japanese Journal of Applied Physics, Vol.61(SA1001), ページ1-6
15/12/2021

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