Nobuhito KOKUBO (小久保伸人)

0120400_基盤理工学専攻, 0120000_大学院情報理工学研究科, The University of Electro-Communications

Superconducting Quantum interference devices | 超伝導量子干渉計

Quantum phenomena

Mesoscopic system

Quantized Vortices

Superconductivity

Low Temperature Physics

量子物理現象

メゾ・ナノ構造

量子渦

超伝導

低温物理学

ジャーナル論文 - rm_published_papers: Scientific Journal 査読済み

NbTiN SQUID-on-tip fabricated by self-aligned deposition using reactive DC magnetron sputtering

by Nobuhito KOKUBO

公開済 06/2024

Applied Physics Letters, 124, 26, 262601-1 - 262601-5

We fabricate superconducting quantum interference devices (SQUIDs) made of niobium-titanium nitride (NbTiN) thin films on the apex of sharp quartz capillaries. By incorporating reactive DC magnetron sputtering into the self-aligned deposition process for the SQUID-on-tip (SOT) fabrication, we produce NbTiN SOT devices with an effective diameter of ∼100 nm. The ø110 nm device has a superconducting transition temperature of 13.2 K, magnetic flux noise down to 0.7 μΦ0/Hz0.5 (4 K), and operating temperatures of 1.8–10 K. The developed technique enables the synthesis of nitride and other superconductors, thereby expanding the range of materials available for SOT devices.

ジャーナル論文 - rm_misc: Technical Report

SQUID on tip made of a superconducting nitride film by a self-aligned deposition method using a reactive DC magnetron sputtering

by Nobuhito KOKUBO

公開済 01/2024

電子通信情報学会超伝導エレクトロニクス研究会